"Contributing to society with advanced technology"
Providing through analytical techniques and physical property
evaluation.
Toray Research Center was established in June 1978 from R&D division of Toray lndustries, Inc. We have been engaged in providing technical support for "cause analysis" and "problem solving" in the fields of research, development and manufacturing, using innovative analytical techniques and physical analyses. We always try to possess cutting edge analytical techniques and brand new analytical methods.
Our strength is the ability to propose solutions to solve problems.
Technical Lineup
Introduction Movie
NanoSIMS 50L
NanoSIMS 50L is a high sensitive mass imaging analyzer, which
is available for the impurity detection at the ppm level and
at the spatial resolution of 50 nm. NanoSIMS 50L is applicable
to the various fields, including the semiconductor and display
devices. Using the labeling technique we uniquely developed,
we can measure the two dimensional bonding structure of
biological specimen.
Technical Data
- Penetration evaluation of the chemical agent to the hair using NanoSIMS
- Distribution of Impurities in semi-conductor device by NanoSIMS
- Imaging and Depth Profiling of SiC-MOSFET by NanoSIMS 50L
- Surface imaging of bio-samples using immunostaining-NanoSIMS
- NanoSIMS Analysis of 3D NAND Flash Memory
- Imaging of cross section of the skin using NanoSIMS
- NanoSIMS elemental analysis for cross-section of SiC-MOSFET
- NanoSIMS Analysis of Automotive Coatings
- NanoSIMS Analysis of Metal Material
- 2D dopant image in cross-section of glass fiber by NanoSIMS
- Coverage evaluation of active material by NanoSIMS
AFM-Raman
AFM-Raman spectroscopy is the latest analytical technique that
combines AFM observation and Raman imaging with the nanometer
level resolution. The newly developed next-generation
AFM-Raman probe enables to perform the highly stable
measurement and nanoscale structural analysis for the carbon
materials such as carbon nanotubes and graphene.
Technical Data
μRBS
Our new RBS system has drastically improved elemental composition analysis, in terms of micro analysis, high mass resolution, and high sensitivity for light elements. High quality focused ion beam of min. 1 micron diameter enables accurate compositional depth profiling on a real device. Furthermore, since the instrument can accelerate various kinds of incident ions with wide range of acceleration voltage, sensitivity of light elements (Li, B, C, N, O, P etc.), and mass resolution of heavy elements have been remarkably improved. By using channeling measurement mode, crystallinity and ratio of substitutional / interstitial atoms can be evaluated. Our new RBS system opens up the possibility of new analytical method in various fields, and gives you new insight for your challenge.
Features of μRBS
- Accurate composition/density analysis in a microscopic region by using focused ion beam
- Quantification of all elements by using high mass resolution mode
- High sensitive detection of light elements (H, Li, B etc.)
Example
Orbitrap Fusion Lumos
Orbitrap Fusion Lumos is a high-performance mass spectrometer
which has the world's highest resolution (500,000) and
advanced analytical functions such as multi-stage MS and
electron transfer dissociation (ETD).
Using the mass
spectrometer, it becomes possible to analyze binding sites of
O-glycan on bio-pharmaceuticals and of the drug on
antibody-drug conjugate.
Technical Data
Introduction Movie
ASTAR-STEM
ACOM-TEM (Automated Crystal Orientation Mapping in TEM) is one
of powerful techniques for the crystallographic
characterization with nanometer spatial resolution. Crystal
orientation and grain size can be evaluated quantitatively.
This technique is based on TEM so that conventional
observation and EDX/EELS measurements are also available in
the same experimental system.
Technical Data
- Crystal orientation map and grain size analysis using ASTAR with nm resolution
- Characterization of grain diameter and crystal orientation in the MEMS devise using ASTAR
- Strain Analysis at nano-meter region using ASTAR
O-PTIR
Optical Photothermal IR Spectroscopy (O-PTIR) enables the
infrared measurement with a high spatial resolution of less
than 1 μm to be impossible by use of conventional FT-IR. It
can be applied to analyse the composition of small foreign
substances, and the interface composition of multi-layered
samples at the same time and with a spatial resolution of less
than 1 μm. By combining Raman instrument, O-PTIR realizes the
high quality analysis of inorganic and organic materials.
Technical Data
