The first ISO/IEC 17025:2017 accreditation in Japan as a testing laboratory for semiconductor impurity analysis using SIMS

Toray Research Center, Inc. (TRC) has obtained ISO/IEC 17025:2017 accreditation as a testing laboratory for semiconductor impurity analysis using SIMS (Secondary Ion Mass Spectrometry) in accordance with international standards (ISO 17560:2014 / JIS K 0164:2023) — the first company in Japan to achieve this (as of our research: December 25, 2024).

This accreditation formally recognizes the technical capabilities of our SIMS analysis at an international level, ensuring that we can provide highly reliable, high-sensitivity, and high-precision impurity analysis data. Moving forward, we will continue to contribute to global quality assurance by providing technical support in the increasingly critical semiconductor industry.

1. About ISO/IEC 17025:2017

ISO/IEC 17025:2017 is an international standard that certifies a testing laboratory’s technical capability to provide accurate and reliable analytical results, while also ensuring the effective operation of its quality management system. It sets the requirements for testing laboratories involved in product inspection, analysis, and measurement worldwide, serving as proof that the laboratory maintains global-level quality and technical expertise.
At TRC, we have obtained this certification through years of dedicated quality assurance efforts and continuous improvement of our technical capabilities. For more details about our quality assurance initiatives, please refer to the link below.
＞Quality Assurance Activities

2. The Importance of Impurity Analysis Using SIMS

2-1. What is SIMS (Secondary Ion Mass Spectrometry)

SIMS (Secondary Ion Mass Spectrometry) is a technique that irradiates bombards a solid surface with an ion beam and analyzes the secondary ions ejected through the sputtering process using mass spectrometry.
A key feature of SIMS is its ability to perform depth profiling analysis and detect trace elements and impurities with high sensitivity.
For more detailed information about the analytical principles and methods, please refer to the following page:
＞Secondary Ion Mass Spectrometry (SIMS)

2-2. The Role of Impurity Analysis in Semiconductors

In semiconductor devices, accurately understanding and controlling the depth distribution of impurities, including dopants, is crucial for improving performance and yield. SIMS is one of the most widely used analytical techniques in the semiconductor field.
In recent years, as high integration and miniaturization have progressed, the control of impurities has become even more critical. High-precision analysis using SIMS has become indispensable for new technology development and quality control. For examples of semiconductor analysis, please refer to the following:
＞Semiconductor & Packaging Analysis

3. SIMS Analysis Achieves Japan’s First ISO/IEC 17025:2017 Laboratory Accreditation

TRC has become the first in Japan to obtain ISO/IEC 17025:2017 laboratory accreditation for impurity analysis in semiconductors using SIMS (ISO 17560:2014 / JIS K 0164:2023). This accreditation signifies that TRC’s SIMS analysis meets international quality standards.

Accreditation Overview

• Organization Name: Toray Research Center, Inc., Surface Science Division, Surface Science Laboratory 1 (Otsu, Shiga, Japan)
• Accreditation Date: December 10, 2024
• Accreditation Number: RTL05240
• Accrediting Body: Japan Accreditation Board (JAB)

The accreditation details are also available on the official JAB website.
https://www.jab.or.jp/en/certification_institutions/2503

4. TRC’s Strengths and Future Prospects

Since its establishment in 1978, TRC has been dedicated to supporting various industries—including advanced materials, semiconductors, displays, batteries, environment, pharmaceuticals, and medical devices—based on its fundamental philosophy of "contributing to society through advanced technology."

4-1. Contribution to the Semiconductor Industry

• Support for Research & Technology Development: TRC provides highly precise analytical data to assist in new product development and process optimization.
• Quality Control in Mass Production Processes: Reliable analysis helps identify process-related issues and improve production yield.
• Impurity Analysis Management through SIMS: TRC’s SIMS analysis further reinforces these initiatives by ensuring high-quality impurity analysis.

4-2. Further Utilization of ISO/IEC 17025 Accreditation

Looking ahead, TRC aims to strengthen its global technical support in the expanding semiconductor industry. By leveraging its ISO/IEC 17025:2017 accreditation, TRC will continue to provide highly reliable SIMS analysis, contributing to the advancement of semiconductor technology.

5. Conclusion & Contact Information

With TRC’s achievement of Japan’s first ISO/IEC 17025:2017 accreditation for SIMS-based semiconductor impurity analysis, we are now able to provide even more reliable analytical services. Our high-sensitivity, high-precision impurity analysis meets diverse needs in research, development, and production management.

For inquiries regarding SIMS analysis or other analytical services, please feel free to contact us. For more details, please also refer to the links below:

• Secondary Ion Mass Spectrometry (SIMS)
• Semiconductor & Packaging Analysis
• Quality Assurance Activities