NanoSIMS 50L

Introduction Movie

Technical Documents

• Imaging and Depth Profiling of SiC-MOSFET by NanoSIMS 50L

NanoSIMS 50L

NanoSIMS 50L is a high sensitive mass imaging analyzer, which is available for the impurity detection at the ppm level and at the spatial resolution of 50 nm. NanoSIMS 50L is applicable to the various fields, including the semiconductor and display devices. Using the labeling technique we uniquely developed, we can measure the two dimensional bonding structure of biological specimen.

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• Analysis and Evaluation