Surface Analysis

Using state-of-the-art surface analytical techniques, we investigate the surface and interfacial composition, structure, state and morphology of various materials that are important to advances in nanotechnology, to elucidate their correlations with characteristics of materials.

Surface analysis under ultra high vacuum condition (SIMS analysis)
Surface analysis under ultra high vacuum condition (SIMS analysis)
Accelerator for RBS/ERDA/NRA/PIXE analysis
Accelerator for RBS/ERDA/NRA/PIXE analysis
Elastic modulus image of phase-separated epoxy resin (SPM analysis)
Elastic modulus image of phase-separated epoxy resin (SPM analysis)
Low-damage XPS depth analysis using C60+ ion etching
Low-damage XPS depth analysis using C60+ ion etching

Capabilities and Applications

Analysis of elemental composition and/or chemical states at surface and interface
Depth profiling of chemical composition and trace elements
Observation of surface morphology
Carrier profiling in semiconductors
Ion implantation

Analytical Techniques

Secondary Ion Mass Spectrometry SIMS, TOF-SIMS
Ion Scattering Spectrometry RBS/ERDA/NRA/PIXE
X-ray Photoelectron Spectroscopy /
X-ray Absorption Fine Structure		 XPS, XAFS
Scanning Probe Microscopy SPM (AFM, SCM/SSRM, etc.)
Glow Discharge Spectroscopy GD-OES, GD-MS