Transmission Electron Microscope : TEM

Principle

We observe the image obtained using the transmitted electrons by irradiating a thin sample with an electron beam accelerated to tens to hundreds of kV. Microscopic images related to the crystal structure can be obtained using transmission electrons and diffracted electrons. TEM specimen preparation methods include the ultra-thin section method, Ar-ion milling method, and FIB method are used depending on the type of material and other requirements.

General layout of a TEM
describing the path of electron beam
in a TEM

A high resolution TEM image of Si(110)

A ray diagram for
the diffraction mechanism in TEM

A selected area
electron diffraction pattern