Rutherford Backscattering Spectrometry : RBS

Principle

RBS is a non-destructive, standard-free analytical method, for accurate elemental composition and density. High energy ion beam is irradiated onto sample surface, and energy spectrum of backscattered incident ions at a given angle is collected. Since the cross section of scattering and the energy of backscattered ion can be calculated theoretically, the elemental composition and its depth profile can be evaluated from the RBS spectrum. This technique can be applied not only for thin films, but also bulk materials such as powder. In addition, by using channeling measurement, the degree of damage in depth of a single crystal, the amount of interstitial/substitutional element in a lattice can be evaluated.