Capacitance-Voltage [C-V] and Current-Voltage [I-V] measurements by Mercury Probe (Hg-Probe)

Mercury Probe enables us to evaluate capacitances, leakage currents and interface state densities of semiconductors and dielectrics using mercury as an electrode. Electrical properties of samples are obtained by applying adequate voltages between a bottom electrode (SUS) and a top electrode (Hg), it implies that it is not necessary to fabricate any electrodes on the samples. Mercury probe measurements are often demonstrated for evaluating capacitance-voltage (C-V) and current-voltage (I-V) properties of dielectrics on films of which the thickness ranges several nm to micrometers. In addition, multi-point Time dependent dielectric breakdown test (TDDB) could also be available. It would be useful as pre-test characterization such as variations in the qualities of dielectrics films or substrate.