Hydrogen Forward scattering Spectrometry : HFS
Nuclear Reaction Analysis : NRA
Particle Induced X-ray Emission : PIXE

Principle

HFS : When high energy ion is irradiated onto a sample surface, hydrogen is forward scattered by elastic scattering. By analyzing the energy spectrum of the recoiled hydrogen, concentration depth profile of hydrogen can be obtained.

NRA : There are several nuclear reactions between high energy ion and light element. By detecting alpha/gamma ray emitted from the nuclear reaction, high sensitive quantification of light element is achieved.

PIXE : Characteristic x-ray is emitted from a sample during high energy ion beam irradiation. By detection the x-rays, high sensitive detection of elements is possible.