Electron Probe Micro Analyzer : EPMA

Principle

When a sample is irradiated with an electron beam, the electrons and material interact strongly, and various electromagnetic waves are emitted from the sample. Among these, characteristic X-rays have wavelengths that are unique to each element. Therefore, by detecting the characteristic X-rays, it is possible to identify the elements contained in a material. (Note: Characteristic X-rays are emitted when electrons are excited by external energy (in this case, an electron beam) and then return to its ground state.) EPMA is a method that can detect characteristic X-rays using analyzing crystal, and has higher spectral resolution and higher detection sensitivity than EDX.