Electron Backscatter Diffraction : EBSD

Principle

When crystalline materials such as metals or ceramics are irradiated with electron beams, the electron backscatter diffraction (EBSD) pattern is observed on the surface of the sample, which provides information on the crystal structure and orientation of the sample. By measuring and analyzing the EBSD pattern while scanning the electron beam using SEM, information on the distribution of the crystal structure and crystal orientation in a small area can be obtained.