Analytical Electron Microscope : AEM

Principle

When a sample is irradiated with electrons accelerated to several hundred kV, not only transmission and diffraction but also various interactions occur. Elemental analysis with a spatial resolution of about 1 nm using EDX and EELS is widely used, and chemical state analysis using EELS has also come to be used.

Interaction between incident electrons
and sample
Example of EDX element map
(advanced LSI)
Schematic diagram of AEM