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Lithography
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What can be obtained using GPC except the molecular weight? - molecular size, branch, composition distribution -
Gel Permeation Chromatography （GPC）/ Size Exclusion Chromatography (SEC) is the powerful tool to obtain molecular weight distribution and estimate values of average molecular weight. Additionally, combined use of various detectors (e.g., DLS, MALS, VISCO) enables to obtain the molecular size in solution and estimate the branching ratio, analyze the composition distribution of copolymer.
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Structural analysis of photoresist at boundary area in resist pattern
It is very important for further miniaturization of semiconductor devices to investigate correlation between chemical structure of resist and Line Width Roughness (LWR). In this study, a novel sampling technique and Pyrolysis-GC/MS combined with micro-GPC enable usto analyze chemical structures of resist pattern in detail.