Ion Implantation

Characterization of defects generated by ion-implantation by cathodoluminescence
TechData_S00263E (PDF:235KB)
Ion Implantation Services in TRC
Aluminum, Beryllium, Iron, Copper and Potassium are new lineups. TechData_P01247E (PDF:353KB)
Low beam energy Ion Implantation
TechData_T00150E (PDF:251KB)