Surface Analysis
Using state-of-the-art surface analytical techniques, we investigate the surface and interfacial composition, structure, state and morphology of various materials that are important to advances in nanotechnology, to elucidate their correlations with characteristics of materials.
Surface analysis under ultra high vacuum condition (SIMS analysis)
Accelerator for RBS/ERDA/NRA/PIXE analysis
Elastic modulus image of phase-separated epoxy resin (SPM analysis)
Low-damage XPS depth analysis using C60+ ion etching
Capabilities and Applications
Analysis of elemental composition and/or chemical states at surface and interface
Depth profiling of chemical composition and trace elements
Observation of surface morphology
Carrier profiling in semiconductors
Ion implantation
Analytical Techniques
| Secondary Ion Mass Spectrometry | SIMS, TOF-SIMS |
|---|---|
| Ion Scattering Spectrometry | RBS/ERDA/NRA/PIXE |
| X-ray Photoelectron Spectroscopy / X-ray Absorption Fine Structure |
XPS, XAFS |
| Scanning Probe Microscopy | SPM (AFM, SCM/SSRM, etc.) |
| Glow Discharge Spectroscopy | GD-OES, GD-MS |
Overseas Collaboration Laboratories
| Solecon Laboratories | SR |
|---|---|
| Materials Diagnostics | ยต-RBS, NRA, High-energy ion implantation |
| Core Systems | Ion implantation |