micro-beam RBS

μRBS

Our new RBS system has drastically improved elemental composition analysis, in terms of micro analysis, high mass resolution, and high sensitivity for light elements. High quality focused ion beam of min. 1 micron diameter enables accurate compositional depth profiling on a real device. Furthermore, since the instrument can accelerate various kinds of incident ions with wide range of acceleration voltage, sensitivity of light elements (Li, B, C, N, O, P etc.), and mass resolution of heavy elements have been remarkably improved. By using channeling measurement mode, crystallinity and ratio of substitutional / interstitial atoms can be evaluated. Our new RBS system opens up the possibility of new analytical method in various fields, and gives you new insight for your challenge.

Features of μRBS

• Accurate composition/density analysis in a microscopic region by using focused ion beam
• Quantification of all elements by using high mass resolution mode
• High sensitive detection of light elements (H, Li, B etc.)

Example