Through detailed morphological studies using electron microscopy at the micro and nano levels, and elemental and state analyses in the ultramicroscopic region, we contribute to greater understanding of nanotechnology, which forms the core of modern science and technology, and to the development of leading edge devices.
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| Optical microscope image |
SEM image | Cross-sectional TEM image of a LSI device |
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| Cross section of a sheet of paper | |||
 Highly skilled preparation of various types of samples
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| TEM image | 3-Dimensional reconstructed image |
High-resolution TEM image of ceramics |
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| Catalyst for fuel cell | |||
Capabilities and Applications
Morphology of surface and internal structure
Chemical composition analysis
Crystal structure characterization
Chemical state analysis
Analytical Techniques
| Morphology | FE-SEM，TEM，STEM |
| Chemical composition | SEM-EDX，EPMA，AES，AEM |
| Crystal structure | ED，nano-ED，EBSD |
| Chemical state | EELS |
| 3-Dimensional structure | TEMT |
